Atmospheric Environment Aligner "EG-303 Series"
Edge grip type aligner that does not contact the back surface of the 300mm wafer.
■High-precision centering with edge grip method using three movable claws ■Minimizes robot waiting time during alignment with optional buffer port *For more details, please refer to the PDF document or feel free to contact us.
- Company:ダイヘン
- Price:Other